Ultimate precision for linear and rotational stages
  • Repeatabilities in three dimensions down to the single digit nanometer range
  • Reliable operation in cryogenic and in-vaccum environments
  • Low-fatigue due to elastic deformation
  • Lubricant-free concept, ideally suited for in-vaccum applications
Flexure-based gear designs
  • Achieve nm precision with μm movements
  • Convert linear to rotational motions