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Unique KB-Systems for advanced beam manipulation
  • UHV-compatible
  • Flexure-based mechanics, ideally suited for in-vacuum applications
  • Piezo motor driven to achieve maximum precision
  • Customized trapezoidal shaped mirrors for elliptical bending
  • Different substrate coatings for a wide energy range
Flexure-based rotation stage for KB-Systems
  • Monolithic design
  • Operating range 0-10 mrad
  • Parasitic movement < 1 μm
  • Piezo motor driven
  • Angular resolution < 3 nrad